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NuclearInstrumentsandMethodsinPhysicsResearchA467–468(2001)771–774Modularoverconstrainedweak-linkmechanismforultraprecisionmotioncontrolDemingShu*,ThomasS.Toellner,EsenE.AlpAdvancedPhotonSource,ExperimentalFacilitiesDivision,ArgonneNationalLaboratory,9700SouthCassAvenue,Argonne,IL60439,USAAbstractWehavedesignedandconstructedanovelminiatureoverconstrainedweak-linkmechanismthatwillallowpositioningoftwocrystalswithbetterthan50nradangularresolutionandnanometerlineardrivingsensitivity.Theprecisionandstabilityofthisstructureallowtheusertoalignoradjustanassemblyofcrystalstoachievethesameperformanceasdoesasinglechannel-cutcrystal,sowecallitan‘‘artificialchannel-cutcrystal.’’Unlikethetraditionalkinematiclinearspringmechanisms,theoverconstrainedweak-linkmechanismprovidesmuchhigherstructurestiffnessandstability.Usingalaminarstructureconfiguredandmanufacturedbychemicaletchingandlithographytechniques,weareabletodesignandbuildaplanar-shape,highstiffness,highprecisionweak-linkmechanism.Inthispaper,wepresentrecentdevelopmentsfortheoverconstrainedweak-linkmechanism.Applicationsofthisnewtechniquetosynchrotronradiationinstrumentationarealsodiscussed.#2001ElsevierScienceB.V.Allrightsreserved.Keywords:Ultraprecisionmechanism;Motioncontrol;X-rayinstrumentation1.IntroductionTherearedesignrestrictionstothenestedchannel-cutgeometry:TheSRI-CAT3-IDbeamlineattheAdvanced*PhotonSource(APS)isdedicatedtohigh-energy-ThelackofavailabilityoflargecrystalswithresolutionX-rayscatteringstudiesintheenergygoodlong-rangecrystallinityrestrictsthesizeofrangeof6–30keV[1].Aspecial2.7-cm-periodtheouterchannel-cutcrystal;*undulator,optimizedforpeakbrillianceisin-Theinputbeampowerabsorbedbythefirststalled.ForX-rayinelasticscatteringexperiments,opticalsurfaceontheouterchannel-cutcrystalthebeamlineopticalsystemincludesa4-crystalin-cancauselocaltemperatureandstrainvaria-linehigh-resolutionmonochromatorusingationsinthecrystal.nestedchannel-cutcrystalgeometrytodeliveranIncertainhigh-energ
